- Title
- Structure and deuterium retention properties of tungsten layers deposited by plasma sputtering in a mixed atmosphere of D₂ and He
- Creator
- Tang, X. H.; Shi, L. Q.; O'Connor, D. J.; King, B.
- Relation
- Journal of Nuclear Materials Vol. 446, Issue 1-3, p. 200-207
- Publisher Link
- http://dx.doi.org/10.1016/j.jnucmat.2013.12.008
- Publisher
- Elsevier BV, North-Holland
- Resource Type
- journal article
- Date
- 2014
- Description
- The influence of the deposition conditions on the surface morphology, crystal structure and deuterium retention of the tungsten layers formed by rf magnetron plasma sputtering in mixed atmosphere of D₂, He and Ar, has been carried out. Helium containing deuterated tungsten layers (named He-WDₓ) on Cu/Si substrate demonstrate serious film damages with zones of cracks, fractures, flaking-off and large surface blisters. However, these kinds of damages do not happen on the He-WDₓ layers performed on mechanically polished polycrystalline Cu substrates because of larger surface roughness of the substrates. The crystal structure of the W layer greatly changes with the additional He in the layer, and large amounts of defects resulting in lattice expansion and X-diffraction peak broadening were produced in the W crystal. He in the W layer has direct impacts on D retention. Both D and He concentrations vary simultaneously with He fraction, attached negative bias and substrate temperature.
- Subject
- tungsten; plasma; deuterium; deposition
- Identifier
- http://hdl.handle.net/1959.13/1307583
- Identifier
- uon:21466
- Identifier
- ISSN:0022-3115
- Language
- eng
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